Issued Patents All Time
Showing 51–52 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7459699 | Method of determining processing position in charged particle beam apparatus, and infrared microscope used in the method | Masahiro Kiyohara, Makoto Sato | 2008-12-02 |
| 6825468 | Fine stencil structure correction device | Masamichi Oi | 2004-11-30 |