Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529531 | Ion source and electron source having single-atom termination structure, tip having single-atom termination structure, gas field ion source, focused ion beam apparatus, electron source, electron microscope, mask repair apparatus, and method of manufacturing tip having single-atom termination structure | Chuhei Oshima, Anto Yasaka, Tatsuya Shimoda | 2020-01-07 |
| 7672048 | Positioning mechanism and microscope using the same | Toyoko Arai, Yutaka Nakae | 2010-03-02 |
| 5200616 | Environment controllable scanning probe microscope | Ryohei Kokawa, Osamu Nishikawa | 1993-04-06 |