Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7678289 | Metrology structure and methods | Kenneth Faase | 2010-03-16 |
| 7365405 | Metrology structure and methods | Kenneth Faase | 2008-04-29 |
| 7079301 | MEMS device and method of forming MEMS device | Michael G. Monroe, Eric L. Nikkel, Michele K. Szepesi, Richard P. Tomasco | 2006-07-18 |
| 6979585 | Micro-electromechanical system | Eric L. Nikkel, Charles C. Haluzak, Chien-Hua Chen, Mickey Szepesi | 2005-12-27 |
| 6917459 | MEMS device and method of forming MEMS device | Eric L. Nikkel, Mickey Szepesi, Sadiq Bengali, Michael G. Monroe | 2005-07-12 |
| 6914709 | MEMS device and method of forming MEMS device | Michael G. Monroe, Eric L. Nikkel, Michele K. Szepesi, Richard P. Tomasco | 2005-07-05 |
| 6488366 | Fluid ejecting device with anchor grooves | Chien-Hua Chen | 2002-12-03 |