Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7273693 | Method for forming a planar mirror using a sacrificial oxide | Eric L. Nikkel, Michael G. Monroe | 2007-09-25 |
| 6979585 | Micro-electromechanical system | Eric L. Nikkel, Stephen Potochnik, Charles C. Haluzak, Chien-Hua Chen | 2005-12-27 |
| 6917459 | MEMS device and method of forming MEMS device | Eric L. Nikkel, Sadiq Bengali, Michael G. Monroe, Stephen Potochnik | 2005-07-12 |