Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996564 | Uniformity control of metal-based photoresists | Erik Robert Hosler, Sheldon Meyers, Scott Kenny | 2021-05-04 |
| 10256126 | Gas flow process control system and method using crystal microbalance(s) | Brian Conerney | 2019-04-09 |
| 10109046 | Methods of detecting faults in real-time for semiconductor wafers | Yunsheng Song | 2018-10-23 |
| 7247209 | Dual outlet nozzle for the combined edge bead removal and backside wash of spin coated wafers | Gary Robertson | 2007-07-24 |