Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12022599 | Polarization-multiplexed radiator system, light source system, and method of operation | William Alexander Schumaker, William A. Barletta, George R. Neil | 2024-06-25 |
| 10996564 | Uniformity control of metal-based photoresists | Robert Boyd Finlay, Sheldon Meyers, Scott Kenny | 2021-05-04 |
| 10748671 | Radial lithographic source homogenizer | Sheldon Meyers | 2020-08-18 |
| 10444645 | Balancing collector contamination of a light source by selective deposition | Sheldon Meyers | 2019-10-15 |
| 9844124 | Method, apparatus and system for using free-electron laser compatible EUV beam for semiconductor wafer metrology | Pawitter Mangat | 2017-12-12 |
| 9754829 | Self-aligned conductive polymer pattern placement error compensation layer | Deniz E. Civay | 2017-09-05 |
| 9748176 | Pattern placement error compensation layer in via opening | Deniz E. Civay | 2017-08-29 |
| 9704807 | Pattern placement error compensation layer | Deniz E. Civay | 2017-07-11 |
| 9633942 | Conductively doped polymer pattern placement error compensation layer | Deniz E. Civay | 2017-04-25 |
| 9541839 | Method and device for splitting a high-power light beam to provide simultaneous sub-beams to photolithography scanners | — | 2017-01-10 |
| 9392679 | Method, apparatus and system for using free-electron laser compatible EUV beam for semiconductor wafer processing | — | 2016-07-12 |