Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109492 | Method of forming a high quality interfacial layer for a semiconductor device by performing a low temperature ALD process | Gabriela Dilliway, Dina H. Triyoso, Elke Erben | 2018-10-23 |