Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8896810 | Liquid immersion scanning exposure system using an immersion liquid confined within a lens hood | Sia Kim Tan, Lei Yuan, Meisheng Zhou | 2014-11-25 |
| 8741511 | Determination of lithography tool process condition | Qun Ying Lin | 2014-06-03 |
| 8572524 | Statistical optical proximity correction | Liang-Choo Hsia, Meisheng Zhou, Zheng Zou | 2013-10-29 |