Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7116430 | Highly-sensitive displacement-measuring optical device | Neal A. Hall, Wook Lee | 2006-10-03 |
| 7068377 | System and method for surface profiling a target object | Thomas Kurfess, Byungki Kim, Hosein Ali Razavi | 2006-06-27 |
| 6853041 | Micro-machined coupled capacitor devices | Butrus T. Khuri-Yakub, Arif Sanli Ergun | 2005-02-08 |
| 6753969 | Microinterferometer for measuring distance with improved sensitivity | Thomas Kurfess, Byungki Kim, Hosein Ali Razavi | 2004-06-22 |
| 6643025 | Microinterferometer for distance measurements | Thomas Kurfess, Byungki Kim, Hosein Ali Razavi | 2003-11-04 |
| 6567572 | Optical displacement sensor | Goksen G. Yaralioglu, Butrus T. Khuri-Yakub | 2003-05-20 |
| 6070468 | Micromachined ultrasonic leaky wave air transducers | Abdullah Atalar, B. T. Khuri-Yakub | 2000-06-06 |
| 6019000 | In-situ measurement of deposition on reactor chamber members | Fred E. Stanke, Butrus T. Khuri-Yakub, Hung Pham | 2000-02-01 |