Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5167760 | Etchback process for tungsten contact/via filling | Xiao-Chun Mu | 1992-12-01 |
| 5035768 | Novel etch back process for tungsten contact/via filling | Xiao-Chun Mu | 1991-07-30 |
| 4980018 | Plasma etching process for refractory metal vias | Xiao-Chun Mu | 1990-12-25 |
| 4775550 | Surface planarization method for VLSI technology | John Chu, Sanjiv Mittal, John T. Orton, Robert Jecmen | 1988-10-04 |
| 4521796 | Memory implant profile for improved channel shielding in electrically alterable read only memory semiconductor device | Kamal Rajkanan | 1985-06-04 |
| 4456978 | Electrically alterable read only memory semiconductor device made by low pressure chemical vapor deposition process | Richard M. Morley, J. S. Sandhu | 1984-06-26 |
| 4330930 | Electrically alterable read only memory semiconductor device made by low pressure chemical vapor deposition process | Richard M. Morley, J. S. Sandhu | 1982-05-25 |
| 4243937 | Microelectronic device and method for testing same | Jagtar S. Sandhu | 1981-01-06 |