Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5876877 | Patterned mask having a transparent etching stopper layer | Isamu Hanyu, Mitsuji Nunokawa | 1999-03-02 |
| 5818078 | Semiconductor device having a regrowth crystal region | Kozo Makiyama, Masahiko Takikawa, Yusuke Matsukura, Toshihide Kikkawa | 1998-10-06 |
| 5607821 | Optical exposure method | Tamae Haruki, Kenji Nakagawa, Masao Taguchi, Hiroyuki Tanaka, Isamu Hanyu | 1997-03-04 |
| 5561010 | Phase shift optical mask and method of correcting defects in optical mask | Isamu Hanyu | 1996-10-01 |
| 5465220 | Optical exposure method | Tamae Haruki, Kenji Nakagawa, Masao Taguchi, Hiroyuki Tanaka, Isamu Hanyu | 1995-11-07 |
| 5428478 | Optical mask and exposure method using the optical mask | Isamu Hanyu | 1995-06-27 |
| 5424153 | Optical mask using phase shift and method of producing the same | — | 1995-06-13 |
| 5418093 | Projection exposure method and an optical mask for use in projection exposure | Isamu Hanyu, Mitsuji Nunokawa | 1995-05-23 |
| 5368963 | Photomask and method of fabricating the same | Isamu Hanyu | 1994-11-29 |