Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9704740 | Semiconductor device having insulating layers containing oxygen and a barrier layer containing manganese | Hirosato Ochimizu, Hiroshi Kudo | 2017-07-11 |
| 8916468 | Semiconductor device fabrication method | Hirosato Ochimizu | 2014-12-23 |
| 8836126 | Semiconductor device having insulating layers containing oxygen and a barrier layer containing manganese | Hirosato Ochimizu, Hiroshi Kudo | 2014-09-16 |
| 6635523 | Semiconductor device and method of manufacturing the same | Yuji Uchiyama, Toshiya Suzuki, Takae Sukegawa | 2003-10-21 |
| 6344363 | Method of making ferroelectric film with protective cover film against hydrogen and moisture | Rika Shinohara, Hiroshi Kudo | 2002-02-05 |
| 5609721 | Semiconductor device manufacturing apparatus and its cleaning method | Kiyokatsu Suzuki, Katsuyoshi Matsuura, Fumitake Mieno, Hirokazu Yamanishi | 1997-03-11 |
| 5233163 | Graphite columnar heating body for semiconductor wafer heating | Fumitake Mieno, Yuji Furumura, Hiroshi Miyata | 1993-08-03 |
| 5041311 | Chemical vapor deposition method using a plasma self-cleaning | Kenji Koyama | 1991-08-20 |
| 4804560 | Method of selectively depositing tungsten upon a semiconductor substrate | Yoshimi Shioya, Yasushi Oyama, Norihisa Tsuzuki, Mamoru Maeda, Masaaki Ichikawa +6 more | 1989-02-14 |
| 4781945 | Process for the formation of phosphosilicate glass coating | Masahide Nishimura, Kanetake Takasaki, Kenji Koyama | 1988-11-01 |