Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11001733 | Compositions for polishing cobalt and low-K material surfaces | Charles A. Poutasse | 2021-05-11 |
| 10858543 | Anti-corrosion polishing composition | Anne Miller | 2020-12-08 |
| 10570315 | Buffered slurry formulation for cobalt CMP | Anne Miller | 2020-02-25 |
| 9284472 | SiCN and SiN polishing slurries and polishing methods using the same | Fusayo SAEKI | 2016-03-15 |