| 6178995 |
Fluid supply apparatus |
Tadahiro Ohmi, Tetu Kagazume, Kazuhiko Sugiyama, Ryousuke Dohi, Kouji Nishino +3 more |
2001-01-30 |
| 6093662 |
Method for generating water for semiconductor production |
Tadahiro Ohmi, Koji Kawada, Yoshikazu Tanabe, Nobukazu Ikeda, Akihiro Morimoto |
2000-07-25 |
| 6060691 |
Device for heating fluid controller |
Nobukazu Ikeda, Michio Yamaji, Tsutomu Tanigawa |
2000-05-09 |
| 6014498 |
Device for heating fluid control apparatus |
Nobukazu Ikeda, Keiji Hirao, Yuji Kawano, Masayuki Hatano, Hiroshi Morokoshi |
2000-01-11 |
| 5983933 |
Shutoff-opening device |
Tadahiro Ohmi, Yuji Kawano, Keiji Hirao, Hisashi Tanaka, Naoya Masuda +8 more |
1999-11-16 |
| 5975112 |
Fluid control device |
Tadahiro Ohmi, Keiji Hirao, Michio Yamaji, Takashi Hirose, Nobukazu Ikeda |
1999-11-02 |
| 5950675 |
Backflow prevention apparatus for feeding a mixture of gases |
Nobukazu Ikeda, Manohar L. Shrestha, Satoshi Kagatsume |
1999-09-14 |
| 5816285 |
Pressure type flow rate control apparatus |
Tadahiro Ohmi, Koji Nishino, Nobukazu Ikeda, Akihiro Morimoto, Koji Kawada +2 more |
1998-10-06 |
| 5791369 |
Pressure type flow rate control apparatus |
Koji Nishino, Nobukazu Ikeda, Akihiro Morimoto, Koji Kawada, Ryosuke Dohi +1 more |
1998-08-11 |
| 5669408 |
Pressure type flow rate control apparatus |
Koji Nishino, Nobukazu Ikeda, Akihiro Morimoto, Koji Kawada, Ryosuke Dohi +1 more |
1997-09-23 |
| 5488967 |
Method and apparatus for feeding gas into a chamber |
Nobukazu Ikeda |
1996-02-06 |
| 5427357 |
Control valve |
Mutsunori Koyomogi, Kunihiko Daido, Masahiko Nakazawa, Masahiko Sogao, Kazuhiro Yoshikawa +2 more |
1995-06-27 |
| 5379982 |
Control valve |
Mutsunori Koyomogi, Masahiko Nakazawa, Kazuhiro Yoshikawa, Tetsuya Kojima |
1995-01-10 |