Issued Patents All Time
Showing 76–92 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9558953 | Etching method, and method of producing semiconductor substrate product and semiconductor device using the same | Naotsugu Muro, Tadashi Inaba, Takahiro Watanabe, Kee Young Park | 2017-01-31 |
| 9548217 | Etching method of semiconductor substrate, and method of producing semiconductor device | Naotsugu Muro, Tadashi Inaba, Atsushi Mizutani | 2017-01-17 |
| 9514958 | Etching method of semiconductor substrate, and method of producing semiconductor device | Yoshinori Nishiwaki, Tadashi Inaba, Atsushi Mizutani | 2016-12-06 |
| 9070636 | Cleaning agent for semiconductor substrate, cleaning method using the cleaning agent, and method for producing semiconductor element | — | 2015-06-30 |
| 9048195 | Polishing fluid and polishing method | — | 2015-06-02 |
| 8940644 | Method of producing a semiconductor substrate product and etching liquid | Atsushi Mizutani, Akiko Yoshii, Tetsuya Shimizu | 2015-01-27 |
| 8932479 | Polishing liquid and polishing method | — | 2015-01-13 |
| 8911643 | Polishing liquid and polishing method | — | 2014-12-16 |
| 8889025 | Etching composition | Tomonori Takahashi, Tadashi Inaba, Atsushi Mizutani, Bing Du, William A. Wojtczak +1 more | 2014-11-18 |
| 8715524 | Polishing liquid | Toshiyuki Saie, Masaru Yoshikawa | 2014-05-06 |
| 8647523 | Etching composition | Tomonori Takahashi, Tadashi Inaba, Atsushi Mizutani, Bing Du, William A. Wojtczak +1 more | 2014-02-11 |
| 8551928 | Multi-agent type cleaning kit for semiconductor substrates, cleaning method using the same and method of producing semiconductor element | — | 2013-10-08 |
| 8419970 | Silicon nitride polishing liquid and polishing method | — | 2013-04-16 |
| 8409467 | Polishing liquid for semiconductor integrated circuit | Toshiyuki Saie | 2013-04-02 |
| 8372304 | Polishing slurry | Tooru Yamada | 2013-02-12 |
| 8338303 | Polishing liquid | — | 2012-12-25 |
| 7927294 | Massaging device | Fujie Hayakawa, Kazuyuki Takeda | 2011-04-19 |