Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12319843 | Polishing compositions and methods of using the same | Qingmin Cheng, Bin Hu, Yannan Liang, Hyosang Lee, Liqing Wen +1 more | 2025-06-03 |
| 12024650 | Polishing compositions and methods of using the same | Qingmin Cheng, Bin Hu, Yannan Liang, Hyosang Lee, Liqing Wen +1 more | 2024-07-02 |
| 11925912 | Fluid processing systems including a plurality of material tanks, at least one mixing tank, at least one holding tank, and recirculation loops | Shih-Pin Chou, Wen-Hung Chang, Deepak Mahulikar, Tamas Varga | 2024-03-12 |
| 11680186 | Polishing compositions and methods of using same | Eric Turner, Carl Ballesteros | 2023-06-20 |
| 11674056 | Polishing compositions containing charged abrasive | — | 2023-06-13 |
| 11603512 | Cleaning compositions and methods of use thereof | Carl Ballesteros, Eric Turner | 2023-03-14 |
| 11499071 | Polishing compositions and methods of use thereof | Alexei P. Leonov | 2022-11-15 |
| 11424131 | Polishing compositions and methods of using same | Carl Ballesteros, Eric Turner | 2022-08-23 |
| 11034861 | Polishing compositions containing charged abrasive | — | 2021-06-15 |
| 10808145 | Polishing compositions containing charged abrasive | — | 2020-10-20 |
| 10759970 | Polishing compositions and methods of using same | Eric Turner, Carl Ballesteros | 2020-09-01 |
| 10763119 | Polishing compositions and methods of using same | Carl Ballesteros, Eric Turner | 2020-09-01 |
| 10703937 | Polishing compositions and methods of use thereof | Alexei P. Leonov | 2020-07-07 |
| 10428241 | Polishing compositions containing charged abrasive | — | 2019-10-01 |
| 10159949 | Advanced fluid processing methods and systems | Shih-Pin Chou, Wen-Hung Chang, Deepak Mahulikar, Tamas Varga | 2018-12-25 |
| 10106705 | Polishing compositions and methods of use thereof | Alexei P. Leonov | 2018-10-23 |
| 9735030 | Polishing compositions and methods for polishing cobalt films | Luling Wang, Deepak Mahulikar, Richard Wen | 2017-08-15 |
| 9735031 | Polishing compositions and methods for polishing cobalt films | Luling Wang, Deepak Mahulikar, Richard Wen | 2017-08-15 |
| 9583359 | Polishing compositions and methods for selectively polishing silicon nitride over silicon oxide films | Luling Wang | 2017-02-28 |
| 9558959 | Polishing compositions and methods for selectively polishing silicon nitride over silicon oxide films | Luling Wang | 2017-01-31 |
| 9368367 | Chemical mechanical polishing of silicon carbide comprising surfaces | Rajiv Singh, Arul Chakkaravarthi Arjunan, Dibakar Das, Deepika Singh, Tanjore V. Jayaraman | 2016-06-14 |
| 8828874 | Chemical mechanical polishing of group III-nitride surfaces | Rajiv Singh, Arul Chakkaravarthi Arjunan, Deepika Singh | 2014-09-09 |
| 8652295 | CMP tool implementing cyclic self-limiting CM process | Rajiv Singh, Deepika Singh | 2014-02-18 |
| 8557133 | Chemical mechanical polishing of silicon carbide comprising surfaces | Rajiv Singh, Arul Chakkaravarthi Arjunan, Dibakar Das, Deepika Singh, Tanjore V. Jayaraman | 2013-10-15 |
| 8506835 | Cyclic self-limiting CMP removal and associated processing tool | Rajiv Singh, Deepika Singh | 2013-08-13 |