Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10690694 | Device and method for determining at least one parameter of a flow of a fluid | Joachim Peinke, Michael Hölling, Jaroslaw Puczylowski | 2020-06-23 |
| 9994950 | Method for depositing a piezoelectric film containing AIN, and a piezoelectric film containing AIN | Hagen Bartzsch, Daniel Glöß, Peter Frach | 2018-06-12 |
| 5763326 | Etching process and device for cleaning semiconductor components, in particular power diodes | — | 1998-06-09 |