Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10407767 | Method for depositing a layer using a magnetron sputtering device | Hagen Bartzsch, Jan Hildisch | 2019-09-10 |
| 9994950 | Method for depositing a piezoelectric film containing AIN, and a piezoelectric film containing AIN | Hagen Bartzsch, Daniel Glöß, Stephan Barth | 2018-06-12 |
| 6132563 | Reactive sputtering process | Hendrik Walde, Christian Gottfried, Klaus Goedicke | 2000-10-17 |
| 6063245 | Magnetron sputtering method and apparatus utilizing a pulsed energy pattern | Klaus Goedicke, Michael Junghähnel, Torsten Winkler, Friedel Haese, Dieter W. Meyer +2 more | 2000-05-16 |
| 6005218 | Process and circuit for the bipolar pulse-shaped feeding of energy into low-pressure plasmas | Hendrik Walde, Jonathan Reschke, Klaus Goedicke, Torsten Winkler, Volker Kirchhoff | 1999-12-21 |