Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10407767 | Method for depositing a layer using a magnetron sputtering device | Peter Frach, Jan Hildisch | 2019-09-10 |
| 9994950 | Method for depositing a piezoelectric film containing AIN, and a piezoelectric film containing AIN | Daniel Glöß, Peter Frach, Stephan Barth | 2018-06-12 |