Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209010 | MEMS and method of manufacturing the same | Malte Florian NIEKIEL, Thomas Lisec, Fabian LOFINK | 2025-01-28 |
| 12013527 | Two degree-of-freedom actuator and MEMS device | Fabian LOFINK, Jide Liang | 2024-06-18 |
| 11350217 | Micromechanical sound transducer | Fabian STOPPEL, Bernhard Wagner | 2022-05-31 |
| 10101222 | Piezoelectric position sensor for piezoelectrically driven resonant micromirrors | Hans-Joachim Quenzer, Joachim Janes, Felix Heinrich | 2018-10-16 |
| 10095023 | Apparatus comprising a spring and an optical element suspended thereon | Dirk KADEN, Christian Eisermann | 2018-10-09 |
| 9733470 | Device comprising a vibratably suspended optical element | Hans-Joachim Quenzer, Joachim Janes | 2017-08-15 |
| 9399573 | Device comprising a spring and an element suspended thereon, and method for manufacturing same | Hans-Joachim Quenzer, Ulrich Hofmann | 2016-07-26 |