Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209010 | MEMS and method of manufacturing the same | Shanshan GU-STOPPEL, Malte Florian NIEKIEL, Thomas Lisec | 2025-01-28 |
| 12013527 | Two degree-of-freedom actuator and MEMS device | Shanshan GU-STOPPEL, Jide Liang | 2024-06-18 |
| 11744158 | Ferroelectric material, MEMS component comprising a ferroelectric material, MEMS device comprising a first MEMS component, method of producing a MEMS component, and method of producing a CMOS-compatible MEMS component | Bernhard Wagner, Dirk KADEN, Simon Fichtner | 2023-08-29 |
| 11742123 | Method of producing an oppositely magnetized magnetic structure | Thomas Lisec | 2023-08-29 |
| 11672127 | Ferroelectric semiconductor device and method for producing a memory cell | Bernhard Wagner, Simon Fichtner | 2023-06-06 |
| 11268122 | Method of producing a cavity having a porous structure | Thomas Lisec | 2022-03-08 |
| 10854223 | Method of producing a magnetic structure | Thomas Lisec | 2020-12-01 |