Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11744158 | Ferroelectric material, MEMS component comprising a ferroelectric material, MEMS device comprising a first MEMS component, method of producing a MEMS component, and method of producing a CMOS-compatible MEMS component | Bernhard Wagner, Fabian LOFINK, Simon Fichtner | 2023-08-29 |
| 10095023 | Apparatus comprising a spring and an optical element suspended thereon | Shanshan GU-STOPPEL, Christian Eisermann | 2018-10-09 |