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Method and system for compensating thermally induced motion of probe cards |
Benjamin N. Eldridge, Gary W. Grube, Richard A. Larder, Makarand Shinde, Gaetan L. Mathieu |
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Method and system for compensating thermally induced motion of probe cards |
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Method and system for compensating thermally induced motion of probe cards |
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Method and system for compensating thermally induced motion of probe cards |
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Method and system for compensating for thermally induced motion of probe cards |
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Method and system for compensating thermally induced motion of probe cards |
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