Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630407 | Plasma etching of organic antireflective coating | Douglas Keil, Eric Wagganer, Rao Annapragada, Tri C. Le | 2003-10-07 |
| 5830540 | Method and apparatus for reactive plasma surfacing | — | 1998-11-03 |