Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5554853 | Producing ion beams suitable for ion implantation and improved ion implantation apparatus and techniques | — | 1996-09-10 |
| 5523652 | Microwave energized ion source for ion implantation | Piero Sferlazzo, Frank R. Trueira | 1996-06-04 |
| 4804852 | Treating work pieces with electro-magnetically scanned ion beams | Marvin Farley, Lee Grodzins | 1989-02-14 |
| 4675530 | Charge density detector for beam implantation | Marvin Farley | 1987-06-23 |
| 4580058 | Scanning treatment apparatus | Eric L. Mears | 1986-04-01 |