Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5523652 | Microwave energized ion source for ion implantation | Piero Sferlazzo, Peter Rose | 1996-06-04 |
| 5420415 | Structure for alignment of an ion source aperture with a predetermined ion beam path | — | 1995-05-30 |