Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5739911 | Position measuring system | Wolfgang Holzapfel | 1998-04-14 |
| 5696584 | Phase grating having an unprotected relief structure with a grating structure that causes destructive interference of reflections | Andreas Franz | 1997-12-09 |
| 5689336 | Photoelectric position measuring system | — | 1997-11-18 |
| 5678319 | Index grating having partial fields that are geometrically offset in the measuring direction | — | 1997-10-21 |
| 5648658 | Apparatus and method for generating position-dependent signals using a scanning plate having a plurality of differently configured scanning regions | Wolfgang Holzapfel | 1997-07-15 |
| 5519492 | Optical arrangement for detecting the intensity modulation of partial ray beams | Wolfgang Holzapfel | 1996-05-21 |
| 5493397 | Multi-coordinate measuring system using a cross grating to create a plurality of diffraction beams emanating from two or more coordinate directions | Michael Aligauer | 1996-02-20 |
| 5430546 | Optical device for measuring relative position of or angle between two objects | — | 1995-07-04 |
| 5424833 | Interferential linear and angular displacement apparatus having scanning and scale grating respectively greater than and less than the source wavelength | Michael Allgauer | 1995-06-13 |
| 5264915 | Interferential measurement device for at least one direction of measurement | Wolfgang Holzapfel, Hans-Rudolf Kober | 1993-11-23 |
| 5206704 | Position measuring apparatus and method of use thereof | Erwin Spanner | 1993-04-27 |
| 4988864 | Photoelectric angle measuring device with adjacent order interference | Dieter Michel | 1991-01-29 |
| 4868133 | Semiconductor wafer fabrication with improved control of internal gettering sites using RTA | — | 1989-09-19 |
| 4851358 | Semiconductor wafer fabrication with improved control of internal gettering sites using rapid thermal annealing | — | 1989-07-25 |
| 4768878 | Test arrangement for non-contacting identification of defects in non-structured surfaces | Wolfgang Heine | 1988-09-06 |
| 4623942 | Method and arrangement for detecting error signals in a disk-drive, and a magnetic test disk therefor | Gerold Kraus, Joachim Hack, Klaus Schulze-Berge, Roland Sold | 1986-11-18 |
| 4333356 | Mixing apparatus | Hermann Bartels, Hans-Christian Mez, Hans-Peter Stolz | 1982-06-08 |