Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7790634 | Method for depositing and curing low-k films for gapfill and conformal film applications | Srinivas D. Nemani | 2010-09-07 |
| 7745351 | Post deposition plasma treatment to increase tensile stress of HDP-CVD SIO2 | Xiaolin Chen, Srinivas D. Nemani, Dongqing Li, Marlon Edward Menezes | 2010-06-29 |
| 7541297 | Method and system for improving dielectric film quality for void free gap fill | Abhijit Basu Mallick, Linlin Wang, Srinivas D. Nemani, Yi Zheng, Zheng Yuan +2 more | 2009-06-02 |
| 7498273 | Formation of high quality dielectric films of silicon dioxide for STI: usage of different siloxane-based precursors for harp II—remote plasma enhanced deposition processes | Abhijit Basu Mallick, Srinivas D. Nemani | 2009-03-03 |
| 7465680 | Post deposition plasma treatment to increase tensile stress of HDP-CVD SIO2 | Xiaolin Chen, Srinivas D. Nemani, Dongqing Li, Marlon Edward Menezes | 2008-12-16 |