Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8754512 | Atomic level bonding for electronics packaging | Ralph S. Taylor | 2014-06-17 |
| 6750152 | Method and apparatus for electrically testing and characterizing formation of microelectric features | John C. Christenson, John E. Freeman, Troy Chase, Robert Lawrence Healton | 2004-06-15 |
| 6555856 | Semiconductor device with means for verifying a hermetic seal therefor | — | 2003-04-29 |
| 6428713 | MEMS sensor structure and microfabrication process therefor | John C. Christenson, John E. Freeman, Troy Chase, Robert Lawrence Healton, David B. Rich | 2002-08-06 |
| 6074891 | Process for verifying a hermetic seal and semiconductor device therefor | — | 2000-06-13 |
| 5936164 | All-silicon capacitive pressure sensor | Douglas Ray Sparks, William J. Baney, Dan W. Chilcott, James Siekkinen | 1999-08-10 |
| 5721162 | All-silicon monolithic motion sensor with integrated conditioning circuit | Peter J. Schubert, Dan W. Chilcott, Mark B. Kearney | 1998-02-24 |
| 5706565 | Method for making an all-silicon capacitive pressure sensor | Douglas Ray Sparks, William J. Baney, Dan W. Chilcott, James Siekkinen | 1998-01-13 |
| 5415726 | Method of making a bridge-supported accelerometer structure | James Logsdon | 1995-05-16 |
| 5413955 | Method of bonding silicon wafers at temperatures below 500 degrees centigrade for sensor applications | Han-Sheng Lee, Dan W. Chilcott | 1995-05-09 |
| 5369057 | Method of making and sealing a semiconductor device having an air path therethrough | Han-Sheng Lee, James Logsdon, Dan W. Chilcott | 1994-11-29 |
| 5284057 | Microaccelerometer having low stress bonds and means for preventing excessive Z-axis deflection | David W. De Roo | 1994-02-08 |
| 5221400 | Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection | David W. DeRoo | 1993-06-22 |
| 5068203 | Method for forming thin silicon membrane or beam | James Logsdon, David W. De Roo, Gerold W. Neudeck | 1991-11-26 |