Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5284057 | Microaccelerometer having low stress bonds and means for preventing excessive Z-axis deflection | Steven E. Staller | 1994-02-08 |
| 5068203 | Method for forming thin silicon membrane or beam | James Logsdon, Steven E. Staller, Gerold W. Neudeck | 1991-11-26 |