Issued Patents All Time
Showing 26–50 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7144750 | Method of fabricating silicon-based MEMS devices | Robert Antaki | 2006-12-05 |
| 7138293 | Wafer level packaging technique for microdevices | Jules J Poisson | 2006-11-21 |
| 7101754 | Titanium silicate films with high dielectric constant | El Khakani My Ali, Sarkar Dilip K., Daniel Brassard | 2006-09-05 |
| 7037745 | Method of making electrical connections to hermetically sealed MEMS devices | — | 2006-05-02 |
| 6937806 | Method of making photonic devices with SOG interlayer | — | 2005-08-30 |
| 6902656 | Fabrication of microstructures with vacuum-sealed cavity | Robert Antaki, Yves Tremblay | 2005-06-07 |
| 6887514 | Method of depositing optical films | Jonathan Lachance, Manuel Grondin, Stephane Blain | 2005-05-03 |
| 6849491 | Method of making high-voltage bipolar/CMOS/DMOS (BCD) devices | Stephane Martel, Yan Riopel, Sebastien Michel | 2005-02-01 |
| 6825127 | Micro-fluidic devices | Heather Tyler | 2004-11-30 |
| 6749893 | Method of preventing cracking in optical quality silica layers | Jonathan Lachance, Sylvie Archambault | 2004-06-15 |
| 6724967 | Method of making a functional device with deposited layers subject to high temperature anneal | Annie Dallaire | 2004-04-20 |
| 6716476 | Method of depositing an optical quality silica film by PECVD | Jonathan Lachance | 2004-04-06 |
| 6656528 | Method of making specular infrared mirrors for use in optical devices | Yves Tremblay | 2003-12-02 |
| 6635509 | Wafer-level MEMS packaging | — | 2003-10-21 |
| 6602791 | Manufacture of integrated fluidic devices | Heather Tyler | 2003-08-05 |
| 6555441 | Method of aligning structures on opposite sides of a wafer | — | 2003-04-29 |
| 6537623 | Manufacture of silica waveguides with minimal absorption | Manuel Grondin | 2003-03-25 |
| 6268620 | Method of forming capacitors on integrated circuit | Yves Tremblay | 2001-07-31 |
| 6133060 | Method of protecting light sensitive regions of integrated circuits | Ted Darwall | 2000-10-17 |
| 6127266 | Stabilization of the interface between tiN and A1 alloys | Yves Tremblay, Luc Gendron | 2000-10-03 |
| 6083805 | Method of forming capacitors in a semiconductor device | Stephane Blain | 2000-07-04 |
| 6074946 | Integrated processing for an etch module using a hard mask technique | Abdellah Azelmad | 2000-06-13 |
| 5935395 | Substrate processing apparatus with non-evaporable getter pump | Yves Tremblay, Luc Gendron | 1999-08-10 |
| 5778682 | Reactive PVD with NEG pump | — | 1998-07-14 |
| 5747361 | Stabilization of the interface between aluminum and titanium nitride | — | 1998-05-05 |