Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5470798 | Moisture-free sog process | — | 1995-11-28 |
| 5457073 | Multi-level interconnection CMOS devices with SOG | — | 1995-10-10 |
| 5447613 | Preventing of via poisoning by glow discharge induced desorption | — | 1995-09-05 |
| 5364818 | Sog with moisture resistant protective capping layer | — | 1994-11-15 |
| 5320983 | Spin-on glass processing technique for the fabrication of semiconductor devices | — | 1994-06-14 |
| 5270267 | Curing and passivation of spin on glasses by a plasma process wherein an external polarization field is applied to the substrate | — | 1993-12-14 |