Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7459329 | Method of fabricating silicon-based MEMS devices | Luc Ouellet | 2008-12-02 |
| 7160752 | Fabrication of advanced silicon-based MEMS devices | Luc Ouellet | 2007-01-09 |
| 7144750 | Method of fabricating silicon-based MEMS devices | Luc Ouellet | 2006-12-05 |
| 6902656 | Fabrication of microstructures with vacuum-sealed cavity | Luc Ouellet, Yves Tremblay | 2005-06-07 |
| 6770213 | Method of inspecting an anisotropic etch in a microstructure | Riopel Yan | 2004-08-03 |
| 6686214 | Method of aligning a photolithographic mask to a crystal plane | Riopel Yan, Annie Vachon | 2004-02-03 |