Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770213 | Method of inspecting an anisotropic etch in a microstructure | Robert Antaki | 2004-08-03 |
| 6686214 | Method of aligning a photolithographic mask to a crystal plane | Robert Antaki, Annie Vachon | 2004-02-03 |