Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10192721 | High-frequency power source | — | 2019-01-29 |
| 9110106 | Phase difference detector, phase difference detection program, and plasma processing system using the phase difference detector | Toyokazu Kitano, Yuji Yoshizako | 2015-08-18 |
| 5760544 | Magnetron microwave generator with filament-life diagnostic circuit | Michio Taniguchi, Hiroaki Oichi, Yoshiki Fukumoto, Daisuke Matsuno | 1998-06-02 |