Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9300271 | Impedance matching device | — | 2016-03-29 |
| 7642879 | Impedance matching apparatus | — | 2010-01-05 |
| 7332981 | Impedance matching apparatus for a plasma chamber comprising two separate storage units and three separate calculators | — | 2008-02-19 |
| 7199678 | Impedance matching apparatus for a plasma chamber comprising two separate storage units and calculators | — | 2007-04-03 |
| 6621372 | Impedance matching device | Kazuki Kondo, Eiji Kaneko, Koji Itadani | 2003-09-16 |
| 5760544 | Magnetron microwave generator with filament-life diagnostic circuit | Michio Taniguchi, Hiroaki Oichi, Yoshiki Fukumoto, Yoshinobu Kasai | 1998-06-02 |