Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9110106 | Phase difference detector, phase difference detection program, and plasma processing system using the phase difference detector | Toyokazu Kitano, Yoshinobu Kasai | 2015-08-18 |
| 5844369 | Automatic phase adjusting circuit for a plasma processing apparatus | Tsuneo Ito, Akie Nakamoto | 1998-12-01 |
| 5399977 | Microwave power source apparatus for microwave oscillator comprising means for automatically adjusting progressive wave power and control method therefor | Michio Taniguchi, Yuji Ishida | 1995-03-21 |