| 7884024 |
Apparatus and method for optical interference fringe based integrated circuit processing |
Chun-Cheng Tsao, Theodore Lundquist, Rajesh Jain |
2011-02-08 |
| 7697146 |
Apparatus and method for optical interference fringe based integrated circuit processing |
Chun-Cheng Tsao, Theodore Lundquist |
2010-04-13 |
| 7488937 |
Method and apparatus for the improvement of material/voltage contrast |
William B. Thompson |
2009-02-10 |
| 7135123 |
Method and system for integrated circuit backside navigation |
Mark Thompson, Theodore Lundquist, William B. Thompson, Catherine Kardach |
2006-11-14 |
| 7115426 |
Method and apparatus for addressing thickness variations of a trench floor formed in a semiconductor substrate |
Patricia Le Coupanec, Theodore Lundquist, William B. Thompson, Mark Thompson, Lokesh Johri |
2006-10-03 |
| 7036109 |
Imaging integrated circuits with focused ion beam |
Chun-Cheng Tsao, Theodore Lundquist, William B. Thompson, Eugene A. Delenia |
2006-04-25 |
| 6955930 |
Method for determining thickness of a semiconductor substrate at the floor of a trench |
Chun-Cheng Tsao |
2005-10-18 |
| 6855622 |
Method and apparatus for forming a cavity in a semiconductor substrate using a charged particle beam |
Mark Thompson |
2005-02-15 |