Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11555791 | Chamber for vibrational and environmental isolation of thin wafers | John Weston Frankovich, Christopher Lee | 2023-01-17 |
| 10871369 | Systems for and methods of measuring photomask flatness with reduced gravity-induced error | Thomas J. Dunn, John Weston Frankovich, Robert Dennis Grejda, Christopher Lee, Yoshihiro Nakamura | 2020-12-22 |