Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11555791 | Chamber for vibrational and environmental isolation of thin wafers | Christopher Lee, Matthew Ronald Millecchia | 2023-01-17 |
| 10871369 | Systems for and methods of measuring photomask flatness with reduced gravity-induced error | Thomas J. Dunn, Robert Dennis Grejda, Christopher Lee, Matthew Ronald Millecchia, Yoshihiro Nakamura | 2020-12-22 |
| 9651358 | Grazing-incidence interferometer with dual-side measurement capability using a common image plane | Joshua Monroe Cobb, Thomas J. Dunn | 2017-05-16 |
| 9638988 | Light multiplexer with color combining element | Joshua Monroe Cobb | 2017-05-02 |
| 8526008 | Interferometer with paraboloidal illumination and imaging optic and tilted imaging plane | Joshua Monroe Cobb, Thomas J. Dunn | 2013-09-03 |
| 8379219 | Compound interferometer with monolithic measurement cavity | Christopher Lee, Michael Joseph Litzenberger | 2013-02-19 |