Issued Patents All Time
Showing 51–72 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5628917 | Masking process for fabricating ultra-high aspect ratio, wafer-free micro-opto-electromechanical structures | Ali Jazairy | 1997-05-13 |
| 5627427 | Silicon tip field emission cathodes | John H. Das, James W. Mayer, James Spallas | 1997-05-06 |
| 5615143 | Optomechanical terabit data storage system | Yu-Hwa Lo | 1997-03-25 |
| 5610335 | Microelectromechanical lateral accelerometer | Kevin A. Shaw, Scott G. Adams | 1997-03-11 |
| 5563343 | Microelectromechanical lateral accelerometer | Kevin A. Shaw, Scott G. Adams | 1996-10-08 |
| 5536988 | Compound stage MEM actuator suspended for multidimensional motion | Z. Lisa Zhang | 1996-07-16 |
| 5506175 | Method of forming compound stage MEM actuator suspended for multidimensional motion | Z. Lisa Zhang | 1996-04-09 |
| 5449903 | Methods of fabricating integrated, aligned tunneling tip pairs | Susanne Arney, Jun Yao | 1995-09-12 |
| 5426070 | Microstructures and high temperature isolation process for fabrication thereof | Kevin A. Shaw, Z. Lisa Zhang | 1995-06-20 |
| 5399415 | Isolated tungsten microelectromechanical structures | Liang Chen | 1995-03-21 |
| 5397904 | Transistor microstructure | Susanne Arney, Jun Yao | 1995-03-14 |
| 5393375 | Process for fabricating submicron single crystal electromechanical structures | Zhoying L. Zhang, Gyorgy A. Porkolab | 1995-02-28 |
| 5375033 | Multi-dimensional precision micro-actuator | — | 1994-12-20 |
| 5363021 | Massively parallel array cathode | — | 1994-11-08 |
| 5316979 | RIE process for fabricating submicron, silicon electromechanical structures | Zuoying L. Zhang | 1994-05-31 |
| 5287082 | Submicron isolated, released resistor structure | Susanne Arney, Jun Yao | 1994-02-15 |
| 5235187 | Methods of fabricating integrated, aligned tunneling tip pairs | Susanne Arney, Jun Yao | 1993-08-10 |
| 5199917 | Silicon tip field emission cathode arrays and fabrication thereof | James Spallas | 1993-04-06 |
| 5198390 | RIE process for fabricating submicron, silicon electromechanical structures | Zuoying L. Zhang | 1993-03-30 |
| 5179499 | Multi-dimensional precision micro-actuator | Jun Yao | 1993-01-12 |
| 5149673 | Selective chemical vapor deposition of tungsten for microdynamic structures | Liang-Yuh Chen, Zuoying L. Zhang | 1992-09-22 |
| 5072288 | Microdynamic release structure | Liang-Yuh Chen, Zuoying L. Zhang | 1991-12-10 |