Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6051866 | Microstructures and single mask, single-crystal process for fabrication thereof | Kevin A. Shaw, Noel C. MacDonald | 2000-04-18 |
| 6027951 | Method of making high aspect ratio probes with self-aligned control electrodes | Noel C. MacDonald | 2000-02-22 |
| 5846849 | Microstructure and single mask, single-crystal process for fabrication thereof | Kevin A. Shaw, Noel C. MacDonald | 1998-12-08 |
| 5847454 | Electrically isolated released microstructures | Kevin A. Shaw, Noel C. MacDonald | 1998-12-08 |
| 5844251 | High aspect ratio probes with self-aligned control electrodes | Noel C. MacDonald | 1998-12-01 |
| 5726073 | Compound stage MEM actuator suspended for multidimensional motion | Noel C. MacDonald | 1998-03-10 |
| 5719073 | Microstructures and single mask, single-crystal process for fabrication thereof | Kevin A. Shaw, Noel C. MacDonald | 1998-02-17 |
| 5536988 | Compound stage MEM actuator suspended for multidimensional motion | Noel C. MacDonald | 1996-07-16 |
| 5506175 | Method of forming compound stage MEM actuator suspended for multidimensional motion | Noel C. MacDonald | 1996-04-09 |
| 5426070 | Microstructures and high temperature isolation process for fabrication thereof | Kevin A. Shaw, Noel C. MacDonald | 1995-06-20 |