Issued Patents All Time
Showing 1–25 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10309728 | Titanium-based thermal ground plane | Carl D. Meinhart, Changsong Ding, Payam Bozorgi, Gaurav Soni, Brian Piorek | 2019-06-04 |
| 9688533 | Using millisecond pulsed laser welding in MEMS packaging | Payam Bozorgi | 2017-06-27 |
| 8807203 | Titanium-based thermal ground plane | Carl D. Meinhart, Changsong Ding, Payam Bozorgi, Gaurav Soni, Brian Piorek | 2014-08-19 |
| 8685266 | Monocyclic high aspect ratio titanium inductively coupled plasma deep etching processes and products so produced | Emily Parker, Brian Thibeault, Marco Francesco Aimi, Masa P. Rao | 2014-04-01 |
| 7718552 | Nanostructured titania | Zuruzi Abu Samah, Marcus Ward, Martin Moskovits, Andrei Kolmakov, Cyrus R. Safinya | 2010-05-18 |
| 7682956 | Three-dimensional metal microfabrication process and devices produced thereby | Masaru P. RAO, Marco Francesco Aimi | 2010-03-23 |
| 7569411 | Metal MEMS devices and methods of making same | Marco Francesco Aimi | 2009-08-04 |
| 7504757 | Multi-finger z-actuator | Kanakasabapathi Subramanian, Xiaojun Huang | 2009-03-17 |
| 7457033 | MEMS tunable vertical-cavity semiconductor optical amplifier | Garrett Cole, E. Staffan Björlin, Qi Chen, John E. Bowers | 2008-11-25 |
| 7339244 | Small scale wires with microelectromechanical devices | Kanakasabapathi Subramanian | 2008-03-04 |
| 7166488 | Metal MEMS devices and methods of making same | Marco Francesco Aimi | 2007-01-23 |
| 7045466 | Three dimensional high aspect ratio micromachining | Kanakasabapathi Subramanian, Xiaojun Huang | 2006-05-16 |
| 7022617 | Small scale wires with microelectromechanical devices | Kanakasabapathi Subramanian | 2006-04-04 |
| 6825967 | Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same | John Chong, Seung-bok LEE, Robert Lewis, Peter Hunt | 2004-11-30 |
| 6794217 | Single crystal silicon micromirror and array | Seung-bok LEE | 2004-09-21 |
| 6788842 | Method and apparatus for internal monitoring and control of reflectors in an optical switch | Robert Kehl Sink, John E. Bowers, Roger Helkey, Robert Anderson | 2004-09-07 |
| 6767614 | Multiple-level actuators and clamping devices | Wolfgang Hofmann, Hercules Neves, Scott G. Adams | 2004-07-27 |
| 6727778 | Transmission line structures for use as phase shifters and switches | Thomas Kudrle, Hercules Neves, Damien C. Rodger | 2004-04-27 |
| 6628041 | Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same | Seung-bok LEE | 2003-09-30 |
| 6563106 | Micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same | John E. Bowers, Roger Helkey, Charles M. Corbalis, Robert Kehl Sink, Seung-bok LEE | 2003-05-13 |
| 6541831 | Single crystal silicon micromirror and array | Seung-bok LEE | 2003-04-01 |
| 6497141 | Parametric resonance in microelectromechanical structures | Kimberly L. Turner | 2002-12-24 |
| 6462391 | Suspended moving channels and channel actuators for microfluidic applications and method for making | John Chong | 2002-10-08 |
| 6449098 | High uniformity lens arrays having lens correction and methods for fabricating the same | Roger Helkey | 2002-09-10 |
| 6342430 | Trench isolation for micromechanical devices | Scott G. Adams, Kevin A. Shaw, Russell Y. Webb, Bryan W. Reed, Timothy Joel Davis | 2002-01-29 |