Issued Patents All Time
Showing 26–50 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6309077 | Motion amplification based sensors | Mohammed T. A. Saif | 2001-10-30 |
| 6239473 | Trench isolation for micromechanical devices | Scott G. Adams, Kevin A. Shaw, Russell Y. Webb, Bryan W. Reed, Timothy Joel Davis | 2001-05-29 |
| 6199874 | Microelectromechanical accelerometer for automotive applications | Gregory J. Galvin, Timothy Joel Davis | 2001-03-13 |
| 6183097 | Motion amplification based sensors | Mohammed T. A. Saif | 2001-02-06 |
| 6180536 | Suspended moving channels and channel actuators for microfluidic applications and method for making | John Chong | 2001-01-30 |
| 6170332 | Micromechanical accelerometer for automotive applications | Kevin A. Shaw, Scott G. Adams | 2001-01-09 |
| 6149190 | Micromechanical accelerometer for automotive applications | Gregory J. Galvin, Timothy Joel Davis | 2000-11-21 |
| 6093330 | Microfabrication process for enclosed microstructures | John Chong, Scott G. Adams, Kevin A. Shaw | 2000-07-25 |
| 6073484 | Microfabricated torsional cantilevers for sensitive force detection | Scott A. Miller, Yang Xu | 2000-06-13 |
| 6051866 | Microstructures and single mask, single-crystal process for fabrication thereof | Kevin A. Shaw, Z. Lisa Zhang | 2000-04-18 |
| 6027951 | Method of making high aspect ratio probes with self-aligned control electrodes | Z. Lisa Zhang | 2000-02-22 |
| 6000280 | Drive electrodes for microfabricated torsional cantilevers | Scott A. Miller, Kimberly L. Turner | 1999-12-14 |
| 5949182 | Light-emitting, nanometer scale, micromachined silicon tips | J. Richard Shealy | 1999-09-07 |
| 5914553 | Multistable tunable micromechanical resonators | Scott G. Adams, Yongmei Wang, James S. Thorp | 1999-06-22 |
| 5862003 | Micromotion amplifier | Muhammad T. A. Saif, Trent Huang | 1999-01-19 |
| 5856722 | Microelectromechanics-based frequency signature sensor | Dan Haronian | 1999-01-05 |
| 5847454 | Electrically isolated released microstructures | Kevin A. Shaw, Z. Lisa Zhang | 1998-12-08 |
| 5846849 | Microstructure and single mask, single-crystal process for fabrication thereof | Kevin A. Shaw, Z. Lisa Zhang | 1998-12-08 |
| 5844251 | High aspect ratio probes with self-aligned control electrodes | Z. Lisa Zhang | 1998-12-01 |
| 5786621 | Microelectromechanical integrated microloading device | Muhammed Taher Abu Saif | 1998-07-28 |
| 5770465 | Trench-filling etch-masking microfabrication technique | Xiaojun Huang, Liang-Yuh Chen | 1998-06-23 |
| 5726073 | Compound stage MEM actuator suspended for multidimensional motion | Z. Lisa Zhang | 1998-03-10 |
| 5719073 | Microstructures and single mask, single-crystal process for fabrication thereof | Kevin A. Shaw, Z. Lisa Zhang | 1998-02-17 |
| 5640133 | Capacitance based tunable micromechanical resonators | Fred M. Bertsch, Kevin A. Shaw, Scott G. Adams | 1997-06-17 |
| 5637539 | Vacuum microelectronic devices with multiple planar electrodes | Wolfgang Hofmann, Liang-Yuh Chen | 1997-06-10 |