Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6093330 | Microfabrication process for enclosed microstructures | John Chong, Scott G. Adams, Noel C. MacDonald | 2000-07-25 |
| 6051866 | Microstructures and single mask, single-crystal process for fabrication thereof | Z. Lisa Zhang, Noel C. MacDonald | 2000-04-18 |
| 5847454 | Electrically isolated released microstructures | Z. Lisa Zhang, Noel C. MacDonald | 1998-12-08 |
| 5846849 | Microstructure and single mask, single-crystal process for fabrication thereof | Z. Lisa Zhang, Noel C. MacDonald | 1998-12-08 |
| 5719073 | Microstructures and single mask, single-crystal process for fabrication thereof | Z. Lisa Zhang, Noel C. MacDonald | 1998-02-17 |
| 5640133 | Capacitance based tunable micromechanical resonators | Noel C. MacDonald, Fred M. Bertsch, Scott G. Adams | 1997-06-17 |
| 5610335 | Microelectromechanical lateral accelerometer | Scott G. Adams, Noel C. MacDonald | 1997-03-11 |
| 5563343 | Microelectromechanical lateral accelerometer | Scott G. Adams, Noel C. MacDonald | 1996-10-08 |
| 5426070 | Microstructures and high temperature isolation process for fabrication thereof | Z. Lisa Zhang, Noel C. MacDonald | 1995-06-20 |