Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7723234 | Method for selective CMP of polysilicon | Suryadevara V. Babu, Anita Natarajan | 2010-05-25 |
| 7186653 | Polishing slurries and methods for chemical mechanical polishing | Sunil Chandra Jha, Sreehari Nimmala, Youngki Hong, Suryadevera V. Babu, Udaya B. Patri | 2007-03-06 |