Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8438001 | Method and apparatus for improving noise analysis performance | Ronald D. Rose, Sanjay Upreti | 2013-05-07 |
| 7723234 | Method for selective CMP of polysilicon | Suryadevara V. Babu, Sharath Hegde | 2010-05-25 |
| 7629258 | Method for one-to-one polishing of silicon nitride and silicon oxide | Suryadevara V. Babu | 2009-12-08 |