Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12196500 | Heat exchange system | Akihiro Ito, Shinichi Nitta | 2025-01-14 |
| 11566723 | Flow path switching valve and manufacturing method therefor | Akihiro Ito, Masayuki Kouketsu, Keiichi Nishikawa, Yasuhisa Hirose | 2023-01-31 |
| 11125342 | Spool valve | Yasuhisa Hirose, Keiichi Nishikawa, Yoshinori Tanaka, Naofumi Yoshida | 2021-09-21 |
| 10907748 | Flow path switching valve and manufacturing method therefor | Akihiro Ito, Masayuki Kouketsu, Keiichi Nishikawa, Yasuhisa Hirose | 2021-02-02 |
| 10553463 | Temperature control system, semiconductor manufacturing device, and temperature control method | Atsushi Kobayashi, Atsuhiko Tabuchi, Hideki Wakai, Kazutoshi Itoh, Yasuhisa Hirose +1 more | 2020-02-04 |
| 9984908 | Temperature control system, semiconductor manufacturing device, and temperature control method | Atsushi Kobayashi, Atsuhiko Tabuchi, Hideki Wakai, Kazutoshi Itoh, Yasuhisa Hirose +1 more | 2018-05-29 |