Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553463 | Temperature control system, semiconductor manufacturing device, and temperature control method | Atsushi Kobayashi, Hideki Wakai, Kazutoshi Itoh, Yasuhisa Hirose, Keiichi Nishikawa +1 more | 2020-02-04 |
| 9984908 | Temperature control system, semiconductor manufacturing device, and temperature control method | Atsushi Kobayashi, Hideki Wakai, Kazutoshi Itoh, Yasuhisa Hirose, Keiichi Nishikawa +1 more | 2018-05-29 |
| 9664460 | Method of supplying temperature control fluid to temperature control system and storage medium | — | 2017-05-30 |
| 8809197 | Plasma etching apparatus and control method | — | 2014-08-19 |