Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903057 | Temperature adjustment device and substrate processing apparatus | — | 2021-01-26 |
| 10553463 | Temperature control system, semiconductor manufacturing device, and temperature control method | Atsushi Kobayashi, Atsuhiko Tabuchi, Kazutoshi Itoh, Yasuhisa Hirose, Keiichi Nishikawa +1 more | 2020-02-04 |
| 9984908 | Temperature control system, semiconductor manufacturing device, and temperature control method | Atsushi Kobayashi, Atsuhiko Tabuchi, Kazutoshi Itoh, Yasuhisa Hirose, Keiichi Nishikawa +1 more | 2018-05-29 |
| 6780795 | Heat treatment apparatus for preventing an initial temperature drop when consecutively processing a plurality of objects | Fujio Suzuki | 2004-08-24 |